1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as low as 0.032 micron. In all cases, the recommendations are for water at the point of distribution (POD).
Product Details
- Published:
- 01/01/2013
- Number of Pages:
- 6
- File Size:
- 1 file , 97 KB
- Redline File Size:
- 2 files , 180 KB
