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The purpose of this document is to specify the recommended method for measuring alphaemissivity in materials utilized in the manufacturing of semiconductors. The method specificallyapplies to gas proportional instruments and designates recommended instrument settings. Inaddition, the method discusses operation of ionization counters. The document also recommendsmethods for determining sample size and for evaluating instrument background accurately.Treatment of data is also outlined, including identification and elimination of systematic errors.The calculation of results and detection limits is detailed with examples in the annexes. Astandard format for reporting results is specified.
Product Details
- Published:
- 05/01/2011
- Number of Pages:
- 32
- File Size:
- 1 file , 150 KB
