1.1 This practice describes techniques for determining gettering rates, sorption capacity, and gas content of nonevaporable getters in the molecular flow region.
1.2 Procedures for activating getters and for determining gas evolution rates are also given.
1.3 The various tests described are mostly destructive in nature. In general, the tests are semiquantitative, but they can be expected to yield comparative information on a single laboratory basis. Multilaboratory reproducibility can be established only with round-robin testing. Single laboratory precision is ±15 % for gettering rate and sorption capacity. Multilaboratory reproducibility is estimated at ±50 %. Gas content measurements may have a substantially greater error due to the uncertainty of the temperature.
1.4 Adverse getter-device interactions such as contamination and poisoning can occur. Such problems are beyond the scope of this practice. The user and seller should establish criteria for controlling problems such as chemical reactions, loose particles, getter location, etc.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 4.
Product Details
- Published:
- 12/10/2002
- Number of Pages:
- 11
- File Size:
- 1 file , 150 KB
