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Covers the classification of air cleanliness of cleanrooms and associated controlled environments exclusively in terms of concentrations of airborne particles. This Standard is identical with and has been reproduced from ISO 14644-1:1999.
Product Details
- Edition:
- 1st
- Published:
- 01/01/2002
- ISBN(s):
- 0733743757
- Number of Pages:
- 20
- File Size:
- 1 file , 180 KB
- Product Code(s):
- 10175035, 10175015, 10175025