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Adopts of ISO 14644-5:2004 to specify basic requirements for cleanroom operations. It is intended for those planning to use and operate a cleanroom.
Product Details
- Edition:
- 1st
- Published:
- 01/06/2006
- ISBN(s):
- 0733770886
- Number of Pages:
- 44
- File Size:
- 1 file , 950 KB
- Product Code(s):
- 10144158, 10144089, 10144137
