1.1 This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.001 μg/L (ppb) to 60 μg/L (ppb).
Product Details
- Published:
- 06/01/2016
- Number of Pages:
- 9
- File Size:
- 1 file , 330 KB
- Redline File Size:
- 2 files , 900 KB
