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1.1 This guide is intended to assist those using energy-dispersive spectroscopy (EDS) for quantitative analysis of materials with a scanning electron microscope (SEM) or electron probe microanalyzer (EPMA). It is not intended to substitute for a formal course of instruction, but rather to provide a guide to the capabilities and limitations of the technique and to its use. For a more detailed treatment of the subject, see Goldstein, et al. (1) This guide does not cover EDS with a transmission electron microscope (TEM).

Product Details

Published:
11/01/2019
Number of Pages:
9
File Size:
1 file , 130 KB