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1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 105 Pa to 10-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum.

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Published:
06/01/2018
Number of Pages:
4
File Size:
1 file , 140 KB