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1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).

Product Details

Published:
12/01/2003
Number of Pages:
10
File Size:
1 file , 94 KB
Redline File Size:
2 files , 160 KB