1.1 This practice covers a technique for collecting samples of materials that are part of the residual gas environment of an evacuated vacuum chamber. The practice uses a device designated as a “cold finger” that is placed within the environment to be sampled and is cooled so that constituents of the environment are retained on the cold-finger surface.
Product Details
- Published:
- 10/01/2015
- Number of Pages:
- 5
- File Size:
- 1 file , 98 KB
