1.1 This method covers the size distribution analysis of particulate contamination, 5 m or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (33 % of the average of two runs) should be expected for replicate counts on the same sample.
Note 1–For satisfactory results on clean parts, it is recommended that all procedures involved in sample preparation be conducted under a dust shield.
Product Details
- Published:
- 09/01/2004
- Number of Pages:
- 4
- File Size:
- 1 file , 36 KB
- Redline File Size:
- 2 files , 71 KB
