1.1 This test method covers the size distribution analysis of particulate contamination, 5 μm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (±33 % of the average of two runs) should be expected for replicate counts on the same sample.
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
Product Details
- Published:
- 04/01/2009
- Number of Pages:
- 4
- File Size:
- 1 file , 78 KB
- Redline File Size:
- 2 files , 150 KB
