1.1 This test method covers the size distribution analysis of particulate contamination, 5 μm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (±33 % of the average of two runs) should be expected for replicate counts on the same sample.
Product Details
- Published:
- 04/01/2020
- Number of Pages:
- 4
- File Size:
- 1 file , 91 KB
- Redline File Size:
- 2 files , 190 KB
