1.1 This practice covers the determination of the particle concentration, by number, and the size distribution of airborne particles in dust-controlled areas and clean rooms, for particles in the size range of approximately 0.01 to 5.0 μm. Particle concentrations not exceeding 3.5 × 106 particles/m 3 (100 000/ft³) are covered for all particles equal to and larger than the minimum size measured.
Product Details
- Published:
- 10/01/2015
- Number of Pages:
- 6
- File Size:
- 1 file , 89 KB
