Many of the process gases required to manufacture semiconductors can have flammable, and highly toxic, explosive properties. The challenge to the mechanical engineer to provide a safe means of handling, storing, piping, and venting process gases and their byproducts while maintaining a pure uncontaminated gas to the use point is a considerable undertaking. The semiconductor industry is relatively new, and many of the processes require the use of toxic and highly flammable gases, which can be unfamiliar to many engineers, officials, and fire departments.
This report outlines a safe means to design the following aspects of hazardous gas usage:
- Storage and handling of high pressure cylinders.
- Gas storage/delivery rooms.
- Gas-handling equipment and piping.
- Cylinder and reactor gas venting.
Units: I-P
Citation: Symposium, ASHRAE Transactions, 1985, vol. 91, pt. 2B, Honolulu, HI
Product Details
- Published:
- 1985
- Number of Pages:
- 14
- File Size:
- 1 file , 1 MB
- Product Code(s):
- D-HI-85-20-2
