This paper will address the changing cleanroom market and technology requirements facing the semiconductor industry. How the industry and owners of semcionductor cleanrooms are responding to the financial pressures and the need to balance technological requirements for advance process areas will also be presented. Technology roadmap and technological concerns with possible solutions for cleanroom owners will also be addressed.
Units: Dual
Citation: Symposium, ASHRAE Transactions, vol. 109, pt. 2, Kansas City, 2003
Product Details
- Published:
- 2003
- Number of Pages:
- 8
- File Size:
- 1 file , 160 KB
- Product Code(s):
- D-20879
