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This specification covers requirements for poly-monochloro-para-xylylene coatings. Primarily for use as a secondary moisture barrier coating on hybrid microcircuit substrates and on active monolithic devices. Additionally, the coating immobilizes undesirable particles remaining in sealed microcircuits and enhances to some degree the strength of fine wire interconnections.
Product Details
- Published:
- 04/01/1994
- File Size:
- 1 file , 2.3 MB
