Demonstrates the unique system dynamics of seven different semiconductor clean room designs. Analyses each system for the interaction of air and water- side dynamics of the HVAC design. Includes a summary of operating costs and recommendations for efficient system operating procedures.
KEYWORDS: Clean rooms, heating ventilation, air conditioning, costs, cost in use, efficiency.
Citation: Symposium, ASHRAE Transactions, vol. 96, pt. 2, St. Louis 1990
Product Details
- Published:
- 1990
- Number of Pages:
- 8
- File Size:
- 1 file , 1.1 MB
- Product Code(s):
- D-18702
